Tom Wirtz: Advanced multimodal nano-analytical capabilities on FIB instruments using SIMS: new developments, applications and prospects

Structural characterization and chemical analysis at the nanometer scale are essential across many fields, including dopant imaging in electronic devices, chemical mapping of sub-cellular biological structures, and isotopic analysis in geology. Our instrument developments focus on four key capabilities: highest spatial resolution, excellent chemical sensitivity, high dynamic range, and isotopic selectivity. Secondary Ion Mass Spectrometry (SIMS) is a powerful surface analysis technique due to its ability to detect all elements and isotopes with high sensitivity and dynamic range. SIMS supports mass spectra acquisition, depth profiling, and 2D/3D chemical imaging. Integrating SIMS with focused ion beam (FIB) instruments enables highly sensitive analysis, ~10 nm resolution imaging, in-situ process control, and direct correlation with complementary techniques such as SE, BSE, and EDX imaging. Within this context, we developed several generations of double-focusing magnetic sector SIMS systems. The latest version includes a continuous focal plane detector capable of parallel mass detection for every pixel, enabling acquisition times as short as 1 s for a full mass spectrum or 2 min for a 512 × 512 pixel SIMS image with excellent signal-to-noise ratio and dynamic range. Compared with time-of-flight systems, it offers higher transmission, better sensitivity, and operation in DC mode, resulting in significantly higher secondary ion counts. The SIMS system is now integrated into several multimodal FIB platforms, including Thermo Fisher DualBeam systems, ZEISS ORION NanoFab, SIMS:ZERO, and RAITH VELION. This work reviews the performance of these instruments, highlights advances in high-resolution 3D chemical imaging, presents applications in fields such as electronics, photovoltaics, biology, and geology, and discusses future trends and prospects.

This is an event in the SSOM spotlight series.

Bio

Dr Tom WIRTZ is Head of Unit “Scientific Instrumentation and Process Technology (SIPT)” at the Luxembourg Institute of Science and Technology (LIST). He holds a PhD degree in materials science from the Institut National Polytechnique de Lorraine and a Habilitation obtained for his work on ion beam instrumentation. He is (co)author of 160 refereed articles in international journals and 13 patents. The SIPT unit is focussing its RDI activities on advancing the frontiers of science and technology through the development of innovative instruments and methodologies across multiple domains, including nano-analytics, optical diagnostics, plasma and vapor deposition technologies, and data-driven materials science. The multidisciplinary team leverages cutting-edge expertise in charged particle optics, particle-matter interactions, optical manipulation, plasma and vapor deposition, and computational modeling to transform innovative ideas and concepts into cutting-edge instruments and methodologies. SIPT’s RDI portfolio encompasses all levels of technological maturity, ranging from fundamental concepts to experimental laboratory demonstrations, industrial-scale demonstrators, and market-ready solutions. Tom’s personal R&D activities focus on nano-analytics combining high-lateral resolution and high-sensitivity chemical analysis using correlative approaches, examples being the in-situ combination of secondary ion mass spectrometry with FIB instruments, helium ion microscopy, transmission electron microscopy and scanning probe microscopy.